Making use of the production manner of the probe for the convergence ion beam processed device and the probe null convergence ion beam

摘要

PROBLEM TO BE SOLVED: To implement extraction from a wide specific range with a probe device of a manipulator having a simple, low-cost and versatile device configuration for a convergent ion beam processing apparatus.;SOLUTION: A convergent ion beam processing apparatus provides a probe for the convergent ion beam processing apparatus capable of freely extracting a specific portion of a wide region and having comb-like distal ends 13 branched into n ways(n≥2) with a branched interval of 20 to 200 μm within the convergent ion beam processing apparatus, and a method of easily manufacturing the probe. Each of the distal ends 13 of the comb-like probe has an angle with a probe supporting part 12, and is operated in parallel with a sample 6 to accurately extract the specific portion of the wide region. The manufacturing method includes: segmenting a comb-like portion 16 from a metal thin plate 15 with a thickness of 30 μm or less using a convergent ion beam processing technique; and mounting and integrating the comb-like portion with the probe supporting part 12 of a mechanism capable of manipulation within a vacuum device, using a gas deposition function.;COPYRIGHT: (C)2012,JPO&INPIT