ADAPTIVE OPTICAL SYSTEM THAT CORRECTS ABERRATION OF EXAMINATION OBJECT AND IMAGE TAKING APPARATUS INCLUDING ADAPTIVE OPTICAL SYSTEM

摘要

PPROBLEM TO BE SOLVED: To provide an adaptive optics system for alleviating the dependence of modulation characteristics caused by polarization of incident radiation, improving the efficiency of light use, and having a space phase modulating unit capable of correcting aberration of an inspected object. PSOLUTION: The adaptive optical system uses the light from a light source as a wavefront aberration measuring light and corrects the aberration of a returned light generated by irradiation of the wavefront aberration measuring light on an inspected object, and includes a means for measuring the aberration and a correcting means for correcting the aberration generated by the inspected object based on the measured aberration, and the correcting means is composed of a space phase modulation means and a folding optical system equipped with a polarization rotating means, and after the space phase modulation means modulates the first polarization component out of polarization components which are respectively different by the returned light, each different polarized light is rotated by the polarization rotating means when the modulated returned light is introduced into the space phase modulation means via the folding optical system once again for modulation, and the second polarization component can be modulated. PCOPYRIGHT: (C)2011,JPO&INPIT