Earthquake damage diffusion reduction method and earthquake damage diffusion reduction system in semiconductor manufacturing equipment

摘要

A method and a system of reducing spreading earthquake damages in a semiconductor manufacturing apparatus are provided to prepare for earthquake damage by sensing a preliminary tremor directly. In a method and a system of reducing spreading earthquake damages, a receiver(28) receives urgency earthquake information based on preliminary tremors allotted through a communications line(26). The preliminary tremor directly is detected by a preliminary tremors detection unit, and a controller(29) stops a manufacturing apparatus for a semiconductor(1) based on the received urgency earthquake information and the detected preliminary tremor.