Method for limiting expansion of earthquake damage and system for limiting expansion of earthquake damage for use in semiconductor manufacturing apparatus

摘要

To predict occurrence of an earthquake so as to minimize damage by preventing an object to be processed from flying out of an opened container. An emergency earthquake notice, which is delivered based on a preliminary tremor through a communication line, is received by a reception part 28, or a preliminary tremor is directly detected by a preliminary-tremor detection part 60. A control part 29 carries out a first step in which an operation of a semiconductor manufacturing apparatus 1 is stopped based on the emergency earthquake notice received by the reception part 28 or the preliminary tremor detected by the preliminary-tremor detection part 60, and a second step in which, when the door mechanism is being opened, the door mechanism 15 is closed.