Method of manufacturing thin film phosphor, thin film phosphors, inorganic EL light emitting element, and field emission display

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a thin-film phosphor by which the thin-film phosphor having high luminance can be produced in a short time, to provide the thin-film phosphor having the high luminance and emission intensity and to provide an apparatus for producing the thin-film phosphor having the high luminance and emission intensity.;SOLUTION: The method for producing the thin-film phosphor comprises a thin-film forming step of forming an amorphous thin film at ≤400°C, a crystal nuclei forming step of heating the thin film, irradiating the thin film with ultraviolet light and forming the crystal nuclei and an ultraviolet light irradiating step of irradiating the thin film in which the crystal nuclei are formed with ultraviolet light and growing crystals. The thin-film phosphor is obtained by the method for production and an irradiation apparatus for producing the thin-film phosphor is provided.;COPYRIGHT: (C)2008,JPO&INPIT