Resist solution supply device and remodeling kit for obtaining the resist solution supply device

摘要

The invention is too provide a resist liquid feeder capable of reducing overall supply cost of resist liquid by avoiding use of an expensive small special vessel that can be directly connected as it is to a current LCD panel manufacturing line while reducing a transportation cost of the resist liquid. In the resist liquid feeder, the concentration and/or viscosity of the liquid in a blending tank is detected. Based on the detection result, the dispensing amount of raw material and solvent is adjusted for dilution control. The resist liquid for products obtained by dilution control is held in a buffer tub for a specified period for stability.