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Electric power supply method and pulse electron source control method to pulse electron source and pulse electron source

机译:脉冲电子源和脉冲电子源的供电方法和脉冲电子源控制方法

摘要

As for this invention, as the ionization chamber (4) and it extracts and accelerates the primary ion and as for the aforementioned pump electronic ion (1), as the acceleration chamber (2) the primary plasma outside (17) it extracts and accelerates the correct voltage and the primary ion in order to propel and negative voltage pulse in order to form the beam of the secondary electron and, the power source which conforms in order to add to the aforementioned electrode (3) (11) it has the electrode in order to form the beam of the secondary electron the pulse electron which is accompanied the acceleration chamber which (2) it has (3) in regard to (1). Selective figure Figure 1
机译:就本发明而言,作为电离室(4)提取并加速一次离子,并且对于上述泵浦电子离子(1),作为加速室(2),外部等离子(17)将其提取并加速为了推动二次电子束而施加正确的电压和一次离子以产生负电压脉冲,以及为了向上述电极(3)(11)添加以顺应性的电源具有该电极为了形成二次电子束,脉冲电子伴随着(2)关于(1)具有(3)的加速室。<选择图>图1

著录项

  • 公开/公告号JP2011511999A

    专利类型

  • 公开/公告日2011-04-14

    原文格式PDF

  • 申请/专利权人 エクシコ・グループ;

    申请/专利号JP20100541820

  • 发明设计人 マカロフ・マクシム;

    申请日2009-01-08

  • 分类号H01J37/077;H01S3/097;

  • 国家 JP

  • 入库时间 2022-08-21 18:19:37

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