Being the film thickness measurement equipment which measures the film thickness of the film thickness measurement equipment

摘要

PROBLEM TO BE SOLVED: To accurately measure film thickness in a simple composition in an optical film thickness measuring device for organic EL optically measuring the film thickness.;SOLUTION: The film thickness measuring device for measuring the film thickness of an organic thin film deposited on a structure comprises: a means for projecting irradiation light of prescribed wavelength on the structure during at least deposition; a means for detecting reflective light intensity or transmission light intensity from the structure to the irradiation light; and a means for specifying the film thickness of the organic thin film based on the reflective light intensity or the transmission light intensity. Absorption spectrum of the organic substance composing the organic thin film is included in a wavelength range giving absorbance in which the prescribed wavelength is 20% or less to a peak value of absorbance, preferably 10% or less.;COPYRIGHT: (C)2008,JPO&INPIT