Electrostatic deflector and an electron beam apparatus using the same

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic deflector and an electron beam device in which adjustment is not needed in assembling and disassembling, and in which repeated and highly precise positioning precision is enabled.;SOLUTION: In the electrostatic deflector 1 which is composed of a non-magnetic conductor and a cylindrical supporting body 5 wherein a plurality of recessed grooves 4 opened at the center axis side along the longitudinal direction are formed with an equal spacing, and which is composed a plurality of electrode pieces 6 that are arranged in the recessed grooves 4 and where a conductive film is formed on the center axis side surface, side walls 4a of the recessed grooves 4 are slanted, and the electrode pieces 6 have slanted parts 6a matching with the side walls 4a of the recessed grooves 4.;COPYRIGHT: (C)2006,JPO&NCIPI