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It irradiates microwave to the plasma chamber which forms the electronic cyclotron resonance field
It irradiates microwave to the plasma chamber which forms the electronic cyclotron resonance field
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机译:它将微波辐射到等离子体室,形成电子回旋共振场
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摘要
Plasma deposition at electronic cyclotronic resonance of electrically conducting layers of electron emitting carbon layer. Microwave power is generated in a plasma chamber comprising an electronic cyclotronic resonance area (9), ionization of a gaseous mixture is produced under a low pressure of 10-4-10-3 mbars, the created ions and electrons diffuse along magnetic field lines (6) to a substrate. Plasma deposition at electronic cyclotronic resonance of electrically conducting layers of electron emitting carbon layer. Microwave power is generated in a plasma chamber comprising an electronic cyclotronic resonance area (9), ionization of a gaseous mixture is produced under a low pressure of 10-4-10-3 mbars, the created ions and electrons diffuse along magnetic field lines (6) to a substrate (3), the gaseous mixture comprises organic molecules and hydrogen molecules, and comprises: (a) heating the substrate (3); (b) creating a plasma from the ionized gaseous mixture for a value of the magnetic field corresponding to the cyclotronic electronic resonance of organic molecules; (c) creating a positive potential difference between the plasma and the substrate, a positive or null polarization being applied to the substrate; and (d) diffusing the plasma to the substrate (3), the substrate is at a temperature to have a deposit of electron emitting material. An Independent claim is also included for a process as above for forming flat screens of large dimensions.
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