Manipulation of the spatter device and this spatter device which possess tubular cathode the true

摘要

PROBLEM TO BE SOLVED: To provide a sputter apparatus with a pipe cathode in which the supply of the pipe cathode is performed via a guide element having flexibility for the purpose of continuous and uniform coating to a substrate.;SOLUTION: The sputter apparatus with the pipe cathode is arranged such that the supply of power, cooling fluid and other media to the pipe cathode takes place via flexible lines and/or tubes which can be wound about a receptor. If the pipe cathode completes a pendulum movement, the lines and/or tubes are wound onto the receptor or wound from it. The pendulum movement of the pipe cathode is preferably such that the pipe cathode is rotated by a certain first angle in a first direction and subsequently by a certain second angle in a second direction, the second angle differing from the first angle.;COPYRIGHT: (C)2007,JPO&INPIT