Profile processing the minute region analytical device null

摘要

PPROBLEM TO BE SOLVED: To provide a fine region analyzer capable of analyzing the cross section of a fine region with high accuracy, without unnecessarily causing modification of the fine sample. PSOLUTION: The fine region analyzer for cross-sectionally processing the sample for analyzing the same comprises a sample stand 1, a converged ion beam device 2, a rotating mechanism 3, an electron beam device 4, a correction part 5 and an analyzer 6. The converged ion beam device 2 is arranged so as to have an oblique glance toward the sample stand, on which the sample is placed and the target is cut obliquely, with respect to the sample stand. The rotating mechanism 3 is rotated on the target so that the sample stand becomes a target position. The electron beam device 4 searches for the target to be cut and observes the target during rotation, and the correction part 5 corrects the position of the target observed by the electron beam device. The analyzer 6 analyzes the secondary ions, discharged from the converged ion beam irradiated to the cross section of the target from the converged ion beam device. PCOPYRIGHT: (C)2008,JPO&INPIT