Chip pickup device and chip pickup method and chip peeling apparatus and chip peeling method

摘要

PROBLEM TO BE SOLVED: To provide chip pickup apparatus and method and chip peeling apparatus and method capable of picking up a chip at high speed without damaging it.;SOLUTION: In the chip pickup apparatus for picking up the chip 6 stuck on a sheet 5 by sucking and holding it using a take-out nozzle 20, a sheet push-up member 24 with spherically formed flexible elastic body such as rubber is mounted on the abutting support surface on the top face of a peeling tool 22. In the moved down state of the take-out nozzle 20, the sheet push-up surface of the sheet push-up member 24 is made to abut the underside of the sheet 5 by becoming planar following the shape of the underside. In the moving up operation wherein the take-out nozzle 20 is moved up along with the chip 6, it pushes up the underside of the sheet 5 while deforming the push-up surface into an upwardly convex shaped curved surface. Thus, the sheet 5 and the chip 6 can be peeled off from each other starting from the outer edge side of the chip.;COPYRIGHT: (C)2007,JPO&INPIT