Cross-section data acquisition methods, systems, and cross-section inspection method

摘要

PPROBLEM TO BE SOLVED: To easily acquire an optional cross-sectional data of a three-dimensional data corresponding to an optional cross section of a measuring object, without having to carry out coordinate alignment or the like. PSOLUTION: The measuring object 12a is mounted on a reference plane 11P, and at least three markers 13a are arranged with the measuring object 12a therebetween. Then, the three-dimensional data of the measuring object 12a are acquired to be aligned with the three-dimensional coordinate values of the markers 13a. The first plane π0 is found, based on the three-dimensional coordinate values of the three markers 13a, to determine the second plane π1 passing through the two markers 131, 132 from among the three markers and perpendicular to the first plane π0. The cross-sectional data of the three-dimensional data are acquired thereafter, based on the intersection of a plane equation that determines the second plane π1 with the three-dimensional data. PCOPYRIGHT: (C)2008,JPO&INPIT