Making use of the homogeneous X-rays, create the x-ray image of the suffering inspection body the device and the mannered

摘要

PROBLEM TO BE SOLVED: To simplify the formation of X-ray images of a specimen by monochromatic X rays.;SOLUTION: The apparatus is equipped with an X-ray source (1), a monochromator (2), a slit collimator (3) and a moving device (10) for the monochromator (2), and the X-ray source (1), the monochromator (2) and the slit collimator (3) are laid out relatively to each other so that the X rays with specific energy of the X rays from the X-ray source (1) can be reflected by the monochromator (2) and can pass through a slit of the slit collimator (3). The monochromator (2) can be moved relatively to the X-ray source (1) and the slit collimator (3) by the moving device (10) so that the condition of a reflection angle (θ) required for the X rays with a specific energy to be reflected by the monochromator (2) while moving can be kept at least almost satisfied and only the X rays with approximately specific energy can pass through the slit of the slit collimator (3).;COPYRIGHT: (C)2004,JPO