Adjustment method inspection method and inspection apparatus of a spatial light modulator, the illumination optical system and the illumination optical system, exposure apparatus, and device manufacturing method

摘要

For example inspection device which can be inspected at any time the reflectivity of the mirror element of the spatial light modulator disposed in the optical path of the illumination optical system. Inspection apparatus for inspecting a spatial light modulator having a plurality of optical elements that are controlled individually are arranged in two-dimensional (10). Conjugate optical system that is disposed downstream of optically spatial light modulator to form a conjugate plane optically conjugate with the array surface, which are arranged in a plurality of optical elements and (11, 12), or the conjugate plane and an inspection unit for an optical detector having a detection surface which is disposed in the vicinity (13), examining the optical properties of a plurality of optical elements on the basis of the detection result of the photodetector (14).