Pattern forming method of organic molecules self-assembled monolayer

摘要

PROBLEM TO BE SOLVED: To stably form a self assembled monolayer (SAM) of organic molecules having high dependence of adsorbing property to a substrate on the cleanliness of the substrate surface for growing. SOLUTION: A clean surface and a contaminated surface are formed on the surface of the substrate 11 so that the self assembled monolayer (SAM) of organic molecules 17 is selectively formed on the clean surface.