The drawing pattern which is drawn making use of pattern area value calculation manner,

摘要

PROBLEM TO BE SOLVED: To reduce an error in backward scattering energy distribution.;SOLUTION: The pattern area computing method is capable of computing each area defined at the center position of each area mesh for compensating proximity effect of drawing with electron beam by virtually dividing a drawing pattern into the area meshes. This pattern area computing method comprises a virtually dividing step (S104) for virtually dividing the drawing pattern into a figure diving meshes in the identical size deviated by 1/2 mesh from the area mesh, and an area distributing step (S116) for distributing an area of pattern within each figure dividing mesh to a plurality of vertexes of each figure dividing mesh while the gravity position is maintained. An error may be lowered in the backward scattering energy distribution.;COPYRIGHT: (C)2007,JPO&INPIT