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Is drawn by the drawing manner and its manner of the pattern edition which possesses alignment pattern the pattern edition
Is drawn by the drawing manner and its manner of the pattern edition which possesses alignment pattern the pattern edition
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机译:用具有对齐图案的图案版的绘制方式及其方式绘制图案版
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摘要
PROBLEM TO BE SOLVED: To provide a pattern forming method capable of forming alignment patterns and a regular pattern with good accuracy of positional relation in a patterned plate with alignment patterns. SOLUTION: When patterns are formed for a patterned plate with a regular pattern B such as a reticle pattern or a shadow mask pattern and alignment patterns A1, A2, A3, the alignment patterns A1, A2, A3 are formed before forming the regular pattern B and the alignment patterns A1, A2, A3 of the same shape are formed again in a superposed state after forming the regular pattern B. Relative displacement between the alignment pattern and the regular pattern varying dependently on the time of a pattern forming system while forming the regular pattern is almost completely corrected, and the lowering of the positional accuracy of pattern varying dependently on pattern size can be suppressed.
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