Capturing each grain of the electron, the ion, the neutral grain and the excited neutral grain which the

摘要

PROBLEM TO BE SOLVED: To provide a method capable of maintaining accurate measurement without having to recalibrate a secondary electron multiplying element measuring system, and a vacuum processing device that precludes the operation from stopping for recalibration that accompanies changes in the measurement accuracy of the secondary electron multiplying element.;SOLUTION: Measured values of a particle, such as a charged particle measured by the element, are multiplied with a ratio A/B of an initial intensity value A of soft X-ray intensity measured in an installation initial stage of the secondary electron multiplying element 4 installed under vacuum condition, with the intensity value B of the soft X-ray intensity measured under measuring use of the element, as a correction factor.;COPYRIGHT: (C)2009,JPO&INPIT