Being production manner of the tungsten oxide thin film for the optical type hydrogen detection material

摘要

PROBLEM TO BE SOLVED: To provide a technology for inexpensively producing a thin film of tungsten oxide, which can be used as a hydrogen-detecting material.;SOLUTION: The thin film of tungsten oxide as an optical hydrogen-detecting material detects hydrogen by using its characteristics of changing an optical transmittance when contacting with an atmosphere containing hydrogen at room temperature. The production method includes controlling a film-forming temperature when forming the thin film of tungsten oxide on a substrate with a sputtering method to adjust the crystallinity of tungsten oxide.;COPYRIGHT: (C)2007,JPO&INPIT