Irradiating laser light to patterning manner of the thin film, and the substrate where the production mannered null

摘要

PROBLEM TO BE SOLVED: To provide a method of patterning excellent in yield by simply stabilizing laser workability, a manufacturing method of a thin film solar cell utilizing the same, and a patterning device for thin film patterning.;SOLUTION: The method of patterning patterns a thin film by irradiating the front surface side of a substrate on which the thin film is formed with laser beams. The substrate is held by a plurality of holding members abutting on the rear surface side of the substrate on which the thin film is not formed. When an area on the thin film on the front surface side of the substrate equivalent to an area on which the holding member is abutted is irradiated with light, a tip abutting on the rear surface side of the substrate of the holding member is movable downward or along the surface of the substrate. In addition, the manufacturing method of the thin film solar cell utilizing the same, and the patterning device for the thin film patterning are provided.;COPYRIGHT: (C)2005,JPO&NCIPI