It is low, depending on the thing which detects the characteristic x-ray which the positive ion which from element analysis evaluation method and that

摘要

PPROBLEM TO BE SOLVED: To provide a new method and apparatus for analyzing/evaluating an element which eliminate a necessity of expensive and large facilities, and sensitively and accurately analyze and evaluate an insulated conductive material sample by using compact and inexpensive facilities. PSOLUTION: Characteristic X rays with low energy of 4 keV or less are generated from a light element or a heavy element contained in the conductive material sample 3 by irradiating the insulated conductive material sample 3 containing at least one of the light element and the heavy element with positive ions having low energy of 2-100 keV. The light element or the heavy element contained in the conductive sample 3 is analyzed and evaluated by detecting the generated characteristic X rays. PCOPYRIGHT: (C)2006,JPO&NCIPI