Double-arm column formula substrate transport robot

摘要

PROBLEM TO BE SOLVED: To provide a double arm row type substrate conveying robot, decreasing the number of motors required, simplifying the structure, reducing the size and weight, and lowering the manufacturing cost.;SOLUTION: In this double arm row type substrate conveying robot 101, arm expanding and contracting mechanisms A, B are provided in two columns right and left, hands 110, 110' are connected to the tips of second arms 107, 107' being final stage arms, and first arms 105, 105' are rotated normally and in the reverse direction with a phase difference, so that the hands 110, 110' are moved linearly with a phase difference. The robot further includes an arm driving means 160. The arm driving means 106 has second permanent magnets 162, 162' corresponding to first permanent magnets 167, 167' provided in the first arms 105, 105', which are rotated in the normal direction and in the reverse direction to thereby rotate the first arms 105, 105' with a phase difference through magnetic coupling of the permanent magnets.;COPYRIGHT: (C)2007,JPO&INPIT