SUBSTRATE TRANSPORTATION ROBOT AND METHOD FOR CONTROLLING SUBSTRATE TRANSPORTATION ROBOT

摘要

A substrate transportation robot comprises: a robot body comprising a first substrate loading part for loading a substrate, and a first hand that includes a first substrate holding mechanism for holding and releasing the substrate loaded on the first substrate loading part; and a robot controller. The robot controller operates the first substrate holding mechanism and the first hand so that the first substrate holding mechanism releases the substrate, and the first hand advances from a retreat position to an advance position in a state without the substrate loaded on the first substrate loading part, and in that advance position, loads the substrate mounted on a substrate mounting body on the first substrate loading part, and thereafter retreats to the retreat position, and during the period when the first hand is retreated, has the substrate loaded on the first substrate loading part be held by the first substrate holding mechanism, and controls the speed of the first hand so that the absolute value of a first maximum speed or the absolute value of a first maximum acceleration during a first period from when the first hand starts to retreat until the substrate is held by the first substrate holding mechanism is a lower speed or lower acceleration than the absolute value of a second maximum speed or the absolute value of a second acceleration during a second period from the point when the substrate was held until retreat of the first hand ends.