Directivity coupled circuit baseplate, directional coupler, and plasma supply system

摘要

Each point extends to the guided wave inside of pipe, the 1st and 2nd transmission route where the basic end is connected mutually in the joining consent X is included. By the fact that 1st and 2nd transmission route amplitude attenuation expedient lies between at least on the one hand, each of 1st and 2nd transmission sutra road surface amplitude of the microwave which is spread abbreviates agrees in the joining consent X. Distance L1 between points of 1st and 2nd transmission route and as for difference of harmony L1+L2 of route length L2 of 1st transmission route and route length L3 of 2nd transmission route, (2n 1) /2 (n: Integer, : Wave length of microwave) it agrees, of the aforementioned distance L1 and of the aforementioned route length L3 difference of harmony L1+L3 and the aforementioned route length L2 (2n 1) does not agree to /2.