Atmospheric pressure plasma discharge processor and atmospheric pressure plasma discharge processing method

摘要

As for this invention, in the processing space which includes the raw materials gas which is activated at the time of atmospheric pressure plasma discharge processing, the particle is difficult to occur, at the same time, the good quality membrane method and the device which you can manufacture film at high speed offers. The device of this invention to excite aforementioned 1st electrode and the gas which exists between aforementioned 2nd electrode groups under atmospheric pressure or the adjacent pressure, by impressing high frequency voltage with the 1st electrode and the 2nd electrode group which oppose, the aforementioned 2nd electrode group to be formed at least from two 2nd electrodes in the atmospheric pressure plasma processor which processes the aforementioned suffering processing body by bleaching in the aforementioned gas which excited the suffering processing body which is mounted on the aforementioned 1st electrode, as for the aforementioned 2nd electrode specified intervalOpening, we are arranged, in order between the aforementioned 2nd electrodes, from the aforementioned suffering processing body side for the aforementioned gas to flow to the aforementioned 2nd electrode direction, we feature that inhalation expedient is provided.