Device for inspecting a micro structure, the inspection program of inspection method and micro structure of the micro structure

摘要

In the speaker section (2), it possesses the plural sound sources, outputs the sound wave from each sound source. The moving element of 3 axial accelerating sensor which is the minute structure of detection tip/chip TP with the arrival namely the aerial vibration of the sound wave which is the roughness and fineness wave which is output from the speaker section (2) moves. Through the probe, on the basis of the output voltage which (4) concerning the change of the value of resistance which changes on the basis of this movement it measures is given. The control section (20) decides the quality of 3 axial accelerating sensor on the basis of quality value namely the measurement data which was measured. In addition, interval of the plural sound sources in order for the synthetic sound field of the sound wave which is synthesized by setting interval of the sound source to specified value on the basis of the range difference to the moving element of 3 axial accelerating sensor and the wave length of the test sound wave, to become maximum, the test sound wave which is the synthetic wave is impressed vis-a-vis the moving element.