首页>
外国专利>
Device for inspecting a micro structure, the inspection program of inspection method and micro structure of the micro structure
Device for inspecting a micro structure, the inspection program of inspection method and micro structure of the micro structure
展开▼
机译:用于检查微观结构的装置,检查方法的检查程序以及该微观结构的微观结构
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To provide an inspection device, an inspection method and an inspection program for detecting accurately a structure having a micro movable part by a simple system.;SOLUTION: A test sound wave is output from a speaker 2. The movable part of a triaxial acceleration sensor which is a micro structure of a detection chip TP is moved by arrival of the test sound wave which is a compressional wave output from the speaker 2, namely, by air vibration. A change of a resistance value changing based on the movement is measured based on an output voltage applied through a probe needle 4. A control part 20 determines a characteristic of the triaxial acceleration sensor based on a measured characteristic value, namely, measured data.;COPYRIGHT: (C)2007,JPO&INPIT
展开▼