Storage medium structure organic electronic device, method of manufacturing an organic electronic device, manufacturing equipment of the organic electronic device, substrate processing system, the protective film, and the control program is stored

摘要

To protect the organic element by protective film that does not change the characteristics of the organic element and has a high sealing force while easing the [challenge] stress. SOLUTION: A substrate processing system Sys, the substrate processing apparatus 10 including the microwave plasma processing apparatus PM4 and second PM3 microwave plasma processing apparatus PM1 evaporation apparatus, the first is placed in a cluster structure, carrying the substrate G fabricating an organic electronic device while keeping the vacuum of space desired substrate G is moved to the unloading. ACHx film 54 to form an organic EL device by depositing device PM1, converted to plasma butyne by the power of the microwave in a microwave plasma processing apparatus PM3 first, so as to cover the organic EL element adjacent to the organic EL device to form a to form a SiNx film 55 on the film 54 aCHx to the nitrogen plasma gas and silane gas by the power of the microwave in a microwave plasma processing apparatus PM4 second. [Selection] Figure Figure 1