PATTERN VERIFICATION METHOD, PATTERN GENERATING METHOD, DEVICE FABRICATION METHOD, PATTERN VERIFICATION PROGRAM, AND PATTERN VERIFICATION SYSTEM

摘要

A pattern verification method and the like for forming a desired pattern by using the imprint method are provided. A pattern verification method for a pattern forming method in which a template pattern of a template is transferred to a resist on a substrate to thus form a resist pattern, and the substrate is processed by using the resist pattern as a mask to thus form a processed pattern, the pattern verification method comprises: extracting any one of a design pattern of the processed pattern, a target pattern of the resist pattern, and a target pattern of the template pattern, as a verification pattern; and verifying whether the verification pattern is a critical pattern or not by comparing a feature value of the verification pattern with a feature value of a critical pattern.