Method of producing trichlorosilane (TCS) rich product stably from hydrogenation of silicon tetra chloride (STC) in fluidized gas phase reactor (FBR) and the structure of the reactor

摘要

A fluidized bed reactor (FBR) for producing chlorosilane mixture containing trichlorosilane (TCS) concentration at least 50% from hydrogenation of special metallurgical silicon (MGSI), which has manganese concentration less than 35 ppmw, silicon tetra chloride (STC), and the method of producing high TCS content chlorosilane mixture is disclosed. The FBR according to current application has an expanded over head zone, whose inner diameter is at least twice bigger than that of the inner diameter of the lower straight zone. Temperature of the reaction bed is controlled between 300° C. to 600° C. within the mean temperature deviation of ±5 C. Reaction pressure is maintained between 3 to 10 bar. Retention time of the STC and hydrogen in the reaction bed is controlled to be shorter than 30 seconds. The FBR of the current application enables higher STY (space time yield; production rate/volume of the reactor) of TCS compared to any other current commercial STC cold converter, which hydrogenise STC to TCS.