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THICKNESS-INFORMATION ACQUISITION APPARATUS, THICKNESS-INFORMATION ACQUISITION METHOD, THICKNESS-INFORMATION ACQUISITION PROGRAM AND MICROSCOPE
THICKNESS-INFORMATION ACQUISITION APPARATUS, THICKNESS-INFORMATION ACQUISITION METHOD, THICKNESS-INFORMATION ACQUISITION PROGRAM AND MICROSCOPE
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机译:厚度信息获取装置,厚度信息获取方法,厚度信息获取程序和显微镜
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摘要
A thickness-information acquisition apparatus includes: an image acquisition section configured to acquire a phase-difference image of a sample; a correlation-distribution computation section configured to compute a correlation distribution of an image in the phase-difference image with respect to pixels of another image in the phase-difference image; and a thickness-information acquisition section configured to acquire information on the thickness of the sample in accordance with the correlation distribution.
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