FAST DEPOSITION SYSTEM AND METHOD FOR MASS PRODUCTION OF LARGE-AREA THIN-FILM CIGS SOLAR CELLS

摘要

Disclosed herein is a fast deposition system and method for mass production of large-area thin-film CIGS solar cells. The fast deposition system includes: a deposition chamber; a plurality of source chambers each coupled at one side thereof to one outer side or both outer sides of the deposition chamber through an opening and closing device, each source chamber including a crucible unit adapted to evaporate a source material; a plurality of effusion nozzle units disposed inside the deposition chamber and detachably engaged with a plurality of crucible units in such a fashion as to fluidically communicate with the crucible units, each of the effusion nozzle units including a plurality of nozzles longitudinally formed at a bottom surface thereof and having an inner space of a predetermined size; and a moving means adapted to forwardly and backwardly move the crucible unit in each of the source chambers.