Method of manufacturing fluid ejection device with dry-film photo-resist layer

摘要

A method of manufacturing a fluid ejection device includes providing a barrier layer and an orifice layer on a substrate, laminating a layer of photo-resist over a substantially planar surface of the orifice layer, forming an orifice in the orifice layer, and forming a counterbore in the layer of photo-resist, with forming a counterbore in the layer of photo-resist including exposing a portion of the substantially planar surface of the orifice layer within the counterbore.