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DEVICE AND METHOD FOR AN ATOMIC FORCE MICROSCOPE FOR THE STUDY AND MODIFICATION OF SURFACE PROPERTIES

机译:用于研究和修饰表面性质的原子力显微镜的装置和方法

摘要

The invention relates to a device for an atomic force microscope (AFM) for the study and/or modification of surface properties. The device comprises a cantilever (flexible bar) having an integrated, piezoresistive sensor, an integrated bimorphic actuator, and a measuring tip. The measuring tip carries at least two metal electrodes, which can be activated via electrical terminals. The measuring tip and/or the cantilever have at least one nanoscopic hole through which synchrotron radiation or laser light is directed onto the material surface to be studied. Furthermore, the invention relates to a method for the study and modification of surface properties and surface-proximal properties, which can be executed using such a device. To this end, atomic force microscopy (AFM), surface enhanced Raman scattering (SERS), photo emission spectroscopy (XPS, XAS), and material modification by local exposure are executed in sequence or simultaneously using the same device.
机译:本发明涉及一种用于原子力显微镜(AFM)的用于研究和/或改变表面性质的装置。该设备包括一个悬臂(柔性杆),该悬臂具有一个集成的压阻传感器,一个集成的双态致动器和一个测量头。测量头带有至少两个金属电极,可以通过电端子激活。测量头和/或悬臂具有至少一个纳米孔,同步辐射或激光通过该孔被引导到要研究的材料表面上。此外,本发明涉及一种用于研究和修改表面性质和表面近端性质的方法,其可以使用这种装置来执行。为此,使用同一设备依次或同时执行原子力显微镜(AFM),表面增强拉曼散射(SERS),光发射光谱法(XPS,XAS)和通过局部曝光进行的材料修改。

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