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LOCK DEVICE FOR ADDING AND REMOVING CONTAINERS TO AND FROM A VACUUM TREATMENT CHAMBER
LOCK DEVICE FOR ADDING AND REMOVING CONTAINERS TO AND FROM A VACUUM TREATMENT CHAMBER
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机译:用于在真空处理室之间添加和移除容器的锁定设备
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摘要
A lock device for adding and removing containers to and from a vacuum treatment chamber, wherein the device comprises carrier plates for the containers, the plates being fastened to a revolving transport means and being transported through lock channels provided in straight sections of the transport means, achieving a sealing effect with said channels. The plates are moved past suction or ventilation openings in the lock channel. In this way, a differential pressure stage can be formed. The device can be flexibly dimensioned and cost-effectively produced.
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