首页> 外国专利> Chemically amplified positive photoresist composition for thick film, thick-film photoresist laminated product, manufacturing method for thick-film resist pattern, and manufacturing method for connection terminal

Chemically amplified positive photoresist composition for thick film, thick-film photoresist laminated product, manufacturing method for thick-film resist pattern, and manufacturing method for connection terminal

机译:用于厚膜的化学放大正型光致抗蚀剂组合物,厚膜光致抗蚀剂层压产品,厚膜抗蚀剂图案的制造方法和连接端子的制造方法

摘要

A chemically amplified positive photoresist composition for thick film that is used for forming a thick-film photoresist layer with a film thickness of 10 to 150 μm on top of a support, including (A) a compound that generates acid on irradiation with active light or radiation, and (B) a resin that displays increased alkali solubility under the action of acid, wherein the component (B) comprises a resin containing a structural unit (b1) with a specific structure, and another resin containing a structural unit (b2) with a specific structure.
机译:用于厚膜的化学放大正型光致抗蚀剂组合物,用于在支撑体顶部形成膜厚为10至150μm的厚膜光致抗蚀剂层,包括(A)在活性光照射下产生酸的化合物或(B)在酸的作用下显示出更高的碱溶解性的树脂,其中组分(B)包括一种树脂,该树脂包含具有特定结构的结构单元(b1),另一种树脂包含结构单元(b2)具有特定的结构。

著录项

  • 公开/公告号US7927778B2

    专利类型

  • 公开/公告日2011-04-19

    原文格式PDF

  • 申请/专利权人 TOSHIKI OKUI;KOICHI MISUMI;

    申请/专利号US20040025833

  • 发明设计人 TOSHIKI OKUI;KOICHI MISUMI;

    申请日2004-12-29

  • 分类号G03C1/00;G03F7/00;

  • 国家 US

  • 入库时间 2022-08-21 18:10:11

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号