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Ultra-precision machine tool

机译:超精密机床

摘要

A five axis motion controlled ultra-precision machine tool is provided in which major portions are composed as a structure completely symmetric about the machining point and errors due to thermal displacement can be minimized. A pair of Y axis guide members (41,41) are secured to the top face of a base (i) at both sides of an X axis slider (3) interposed therebetween for X direction so as to movably guide Y axis sliders (4,4) in horizontal Y direction perpendicular to X axis. Y axis linear motors (42,42) and the Y axis guide members (41,41) are disposed substantially at the center of mass of the Y axis sliders (4,4) respectively, so that the Y axis sliders (4,4) can be driven in Y direction with vibration and errors in alignment minimized.
机译:提供一种五轴运动控制的超精密机床,其中主要部分构成为关于加工点完全对称的结构,并且可以使由于热位移引起的误差最小。一对Y轴引导构件( 41,41 )在插入的X轴滑块( 3 )的两侧固定到基座(i)的顶面它们在X方向之间移动,以便在垂直于X轴的水平Y方向上可移动地引导Y轴滑块( 4,4 )。 Y轴线性电动机( 42,42 )和Y轴导向构件( 41,41 )基本上设置在Y轴滑块( > 4,4 ),从而可以在Y方向上驱动Y轴滑块( 4,4 ),并且振动和对齐误差最小。

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