judging method and ultra-precision complex machining apparatus of the processing means in the ultra-precision composite processing equipment

摘要

ultra-precision complex machining apparatus for producing a fine workpiece from the workpiece (100) A method of determining the processing means in the ultra precision combined machining equipment (100), the electromagnetic wave processing means for roughing the workpiece (10), subjected to precision machining for the roughing has been said workpiece precision machining means (30) for, as well, it becomes to have a shape measuring means (50) for measuring the shape of the workpiece during use of the electromagnetic wave processing means (10) and precision machining means (30) In the determination of the processing means, the information of the three-dimensional shape model of a fine workpiece, and information about the removal volume to be removed from the workpiece in the production of micro-workpiece; and the data relates to the removal processing time of the electromagnetic wave processing means (10) and based on the data relating to removal processing time precision machining means (30), characterized in that it is determined whether use or use electromagnetic processing means (10) or precision machining means (30) methods.