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confocal imaging system, focusing system for use with a substrate, and processes for examining an object, and focusing for use with a substrate.
confocal imaging system, focusing system for use with a substrate, and processes for examining an object, and focusing for use with a substrate.
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机译：共焦成像系统，与基板一起使用的聚焦系统，以及检查对象和与基板一起使用的聚焦的方法。
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摘要
A confocal imaging system utilizing an elongated beam. Specific embodiments are directed to the apparatus with charged couple devices (CCD) and those in which the apparatus is used in fluorescent object observation.
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