Multiple prototyping process for mechanical capacitive microsensors.

摘要

Process multiple prototyping for mechanical microsensors capacitive type, based on the identity of the value of a number of geometric parameters: in mechanical microsensors, comprising the steps of:; sqbullet Defined in a substrate (5) microstructures (2). ; sqbullet Defining on the microstructures (2) a capacitor plate (3). ; sqbullet Positioning a second upper substrate layer (8) a second condenser plate (9) rigid. ; sqbullet Define a third layer lower substrate (10), cavities (12). ; sqbullet Stacking and pasting the three substrate layers (5, 8 and 10).