Storage container for liquid chlorosilane and closing lid therefor

摘要

The storage container (10) for a liquid chlorosilane comprises, a tank (11) which stores the liquid chlorosilane, a valve (40) which is connected to the tank (11) and to which an external pipe (21, 31) can be connected detachably, and a closing lid (60) which seals the valve (40) when the external pipe (21, 31) is detached from the valve (40). The valve (40) comprises a housing (41) and a valve body (44) provided in the housing (41). The closing lid (60) has a lid body (61) having a sealing surface (61a) contacting a connecting surface (42a) of the connecting flange (42), a supply pipe (62) which supplies an inert gas to a space (S) between the closing lid (60) and the valve body (44) in the housing (41), a supply valve (63) which opens or closes the supply pipe (62), a discharge pipe (64) which discharges a gas in the space (S), and a discharge valve (65) which opens or closes the discharge pipe (64).