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A process for making a micro-fluid ejection device having high resistance heater film
A process for making a micro-fluid ejection device having high resistance heater film
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机译:具有高电阻加热膜的微流体喷射装置的制造方法
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摘要
A process for making a micro-fluid ejection head comprising a semiconductor substrate. The substrate includes a plurality of fluid ejection actuators disposed on the substrate. Each of the fluid ejection actuators includes a thin heater stack comprising a thin film heater and one or more protective layers adjacent the heater. The thin film heater is made of a tantalum-aluminum-nitride thin film material having a nano-crystalline structure consisting essentially of AIN, TaN, and TaAl alloys, and has a sheet resistance from about 30 to about 100 ohms per square. The thin film material contains from about 30 to about 70 atomic% tantalum, from about 10 to about 40 atomic% aluminum and from about 5 to about 30 atomic% nitrogen.
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