APPARATUS FOR FORMING CARBON NANOTUBE WITH IMPROVED PRODUCTIVITY AND HEAT ENERGY EFFICIENCY

摘要

PURPOSE: An apparatus for forming carbon nanotube is provided to control the growth of a carbon nanotube through the adjustment of a substrate and to reduce heat loss.;CONSTITUTION: An apparatus for forming carbon nanotube comprises a chamber(10), a gas feeding portion(20) supplying source gas and ambient gas, a substrate(30) on which the carbon nanotube is grown up, a heating block(40), a heating portion(50), and a sensing portion(60) sensing the growth length of carbon nanotube.;COPYRIGHT KIPO 2011