APPARATUS FOR DEPOSITING A THIN FILM, CAPABLE OF RECOVERING A DEPOSITING MATERIAL FROM A SEPARATE DEPOSITING MATERIAL RECYCLING DEVICE AFTER SEPARATING FIRST BARRIER ASSEMBLY FROM A THIN-FILM DEPOSITING DEVICE

摘要

PURPOSE: An apparatus for depositing a thin film is provided to enhance depositing efficiency by raising a depositing material recycling rate and to prevent pattern errors due to the temperature raise of a second nozzle by uniformly maintaining the temperature of a second nozzle frame.;CONSTITUTION: An apparatus(100) for depositing a thin film consists of a depositing source(110), a first nozzle(120), a second nozzle(150) and a second nozzle frame(155). The first nozzle comprises a plurality of first slits. The second nozzle comprises a plurality of second slits. The second nozzle frame comprises a first edge and a second edge and is connected to the second nozzle to supports it. The first and second edges are formed in a direction in which the second slits are arranged. The second edge connects two first edges. The second edge is bent in a direction, in which the second slits are arranged, and is formed in an arc form.;COPYRIGHT KIPO 2011