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DEVICE AND METHOD OF SUPPLYING POWER TO AN ELECTRON SOURCE, AND ION-BOMBARDMENT-INDUCED SECONDARY-EMISSION ELECTRON SOURCE
DEVICE AND METHOD OF SUPPLYING POWER TO AN ELECTRON SOURCE, AND ION-BOMBARDMENT-INDUCED SECONDARY-EMISSION ELECTRON SOURCE
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机译:向电子源供电以及离子轰击诱发的二次发射电子源的装置和方法
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摘要
The device (14) has a positive pulse generating unit and a negative pulse generating unit to generate multiple positive and negative pulses on high pressure outlets, respectively, where each negative pulse is generated after a part of each positive pulse. A delay generating unit generates a delay between the end of operation of the positive pulse generating unit and the starting of operation of the negative pulse generating unit. The positive pulse generating unit is configured so that the pulse has voltage greater than voltage of following pulse. Independent claims are also included for the following: (1) a method for providing electric supply from an electron source to a secondary emission under ionic bombardment in a low pressure chamber (2) an electron source.
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