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DEVICE AND METHOD OF SUPPLYING POWER TO AN ELECTRON SOURCE, AND ION-BOMBARDMENT-INDUCED SECONDARY-EMISSION ELECTRON SOURCE

机译:向电子源供电以及离子轰击诱发的二次发射电子源的装置和方法

摘要

The device (14) has a positive pulse generating unit and a negative pulse generating unit to generate multiple positive and negative pulses on high pressure outlets, respectively, where each negative pulse is generated after a part of each positive pulse. A delay generating unit generates a delay between the end of operation of the positive pulse generating unit and the starting of operation of the negative pulse generating unit. The positive pulse generating unit is configured so that the pulse has voltage greater than voltage of following pulse. Independent claims are also included for the following: (1) a method for providing electric supply from an electron source to a secondary emission under ionic bombardment in a low pressure chamber (2) an electron source.
机译:装置(14)具有正脉冲产生单元和负脉冲产生单元,以分别在高压出口上产生多个正脉冲和负脉冲,其中每个负脉冲在每个正脉冲的一部分之后产生。延迟产生单元产生正脉冲产生单元的操作结束与负脉冲产生单元的操作开始之间的延迟。正脉冲产生单元被配置为使得该脉冲具有大于后续脉冲的电压的电压。还包括以下方面的独立权利要求:(1)一种在低压腔室中的离子轰击下从电子源向二次发射提供电力的方法(2)电子源。

著录项

  • 公开/公告号KR20100134558A

    专利类型

  • 公开/公告日2010-12-23

    原文格式PDF

  • 申请/专利权人 EXCICO GROUP;

    申请/专利号KR20107017749

  • 发明设计人 MAKAROV MAXIME;

    申请日2009-01-08

  • 分类号H01J3/02;

  • 国家 KR

  • 入库时间 2022-08-21 17:53:05

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