Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source

摘要

The power supply device (14) for an ion-bombardment-induced secondary-emission electron source in a low-pressure chamber includes a control input, two high-voltage outputs, an element for generating a plurality of positive pulses on a high-voltage output, and an element for generating a negative pulse on the other high-voltage output after at least some of the positive pulses.