TEST PATTERN ARRAY FOR THE TEST PATTERN FOR PCM MODULE AND PCM MODULE USED FOR THE PROCESS OF MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: The test pattern array for the test pattern for PCM module and PCM module use the LCR cyclometer and the elaborate measured value of the parasitic component is gotten.;CONSTITUTION: The first pad(110) is connected to the metal wiring of one side. The second pad(120) is connected to the metal wiring of the other side. A plurality of first branch lines(130) is branched from the first pad to the linear type. A plurality of second branch lines(140) is branched from the second pad to the linear type.;COPYRIGHT KIPO 2011