Test pattern for Process Control Monitering module and test pattern array for Process Control Monitering module

摘要

The test pattern for the first pad is connected to the metal wiring of one PCM module according to the embodiment; The second pad is connected with metal wiring of the other; A plurality of first branch line branches to the straight line from the first pad; And including a plurality of second branch line is branched in a straight line fashion from the second pad and the first branch line and the second branch lines are alternately arranged with each other for generating an additional capacitance being formed such that the end portion is superposed it features. ; The test pattern for PCM module according to an embodiment can be the additional capacitor structure is largely formed while still area is minimized disposed in the scribe lane region of the wafer, by using an LCR meter to obtain a precise measurement of the parasitic it is effective. ; PCM module, the parasitic capacitance test pattern, pads, metal wires